Diamond icosahedron on a TiN-coated steel substrate

نویسندگان

  • Juraj Breza
  • Magdalena Kadlecíková
  • M. Vojs
  • M. Michalka
  • Marián Veselý
  • T. Danis
چکیده

Diamond layers have been deposited by hot filament chemical vapour deposition (HF CVD) on TiN-coated steel substrates. After deposition, we could observe separate, well-developed diamond icosahedrons and decahedrons on the surface. We have found that a lower content of methane in hydrogen supports their growth, this being a result of multifold twinning. The quality of diamond layers has been evaluated by Raman spectroscopy and scanning electron microscopy. q 2004 Elsevier Ltd. All rights reserved.

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عنوان ژورنال:
  • Microelectronics Journal

دوره 35  شماره 

صفحات  -

تاریخ انتشار 2004